The Effect of Hydrogen Doping on the Electrochemical Etching of Ion-Irradiated n-Type Silicon

Liang, H. D., Breese, M. B. H., Duttagupta, S., Aberle, A. G., Bettiol, A. A., & Venkatesan, T. (2018). The Effect of Hydrogen Doping on the Electrochemical Etching of Ion-Irradiated n-Type Silicon. ECS Journal of Solid State Science and Technology, 7(8), N110–N113.  http://jss.ecsdl.org.libproxy1.nus.edu.sg/content/7/8/N110