Ultra-low loss ridge waveguides on lithium niobate via argon ion milling and gas clustered ion beam smoothening

Siew, S. Y., Cheung, E. J. H., Liang, H., Bettiol, A. A., Toyoda, N., Alshehri, B., … Danner, A. J. (2018). Ultra-low loss ridge waveguides on lithium niobate via argon ion milling and gas clustered ion beam smoothening. Optics Express, 26(4), 4421–4430. https://doi.org/10.1364/OE.26.004421